Air flotation conveying: Non-contact conveying, dust-free, and with efficient ESD control
Fast tact time: Conveying and coating are combined to eliminate the reciprocating motion of the cutter head
Air flotation conveying: Non-contact conveying, dust-free, and with efficient ESD control
Fast tact time: Conveying and coating are combined to eliminate the reciprocating motion of the cutter head
Details
· Air flotation conveying: Non-contact conveying, dust-free, and with efficient ESD control
· Fast tact time: Conveying and coating are combined to eliminate the reciprocating motion of the cutter head
Specification
Applicable process |
PR、PI、Perovskite… |
X-axis accuracy |
Positioning accuracy: ±1μm; Horizontal straightness: ±2μm; Vertical straightness: ±2μm |
Z-axis accuracy | Positioning accuracy: ±1μm; Horizontal straightness: ±2μm; Vertical straightness: ±2μm |
Online accuracy monitoring |
Monitor coating gaps, pre-coating gaps, etc., design supporting mechanisms, and achieve automatic precision adjustment |
Data visualization |
All equipment parameters are reported, visualized, and the data related to takt time and production capacity are automatically outputted |
FPD
PV
Semiconductor