·  More advanced air flotation conveying: 

Non-contact conveying, dust-free, and with efficient ESD control;Faster tact time: Conveying and coating are combined to eliminate the reciprocating motion of the cutter head, vacuum adsorption/vacuum breaking, ROB wafer transmition, etc.;

·  Diverse industrial configurations: Customized process equipment: 

testing, lamp covers, air knives, etc.; air flotation plates can be added as needed;

·  Flexible production line layout: 

CPCV design, upstream and downstream can be combined with CPCVs or robotic arms, flexibly adjusted according to equipment strategy;

·  Online accuracy monitoring: 

Monitor coating gaps, pre-coating gaps, etc., design supporting mechanisms, and achieve automatic precision adjustment;

·  Data visualization: 

All equipment parameters are reported, visualized, and the data related to takt time and production capacity are automatically outputted.

Positioning accuracy

Horizontal straightness

Vertical straightness