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PSG Removal Equipment

Applicable process: TOPCon, PERC
Silicon wafer size: 182~230mm

  • PSG Removal Equipment
  • PSG Removal Equipment
  • PSG Removal Equipment
  • PSG Removal Equipment
  • PSG Removal Equipment


Details

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· Applicable process: TOPCon, PERC


· Silicon wafer size: 182-230mm




Features

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High-speed, precision etching roller



Powered water film control



Multi-uniform flow channel


Multi-zone level control



Super wind knife






Specification

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Eff ective length of HF tank



QTY of lanes



Rated speed



Capacity of equipment


2.0-2.3m


182mm for 12 lanes


210mm for 10 lanes


5.5 m/min

182mm*182mm≥18000pcs/h

182mm*210mm≥18000pcs/h

(210mm side parallel to the rollers)

210mm*210mm≥15500pcs/h



Inquiry
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